Beta Software
The software or databases downloaded from this page are beta releases and have been rapidly developed based on requested features or fixes from users. For example, new gas configurations can be available in just a few days (where gas properties data are available).
Due to this rapid deployment methodology, all beta software on BrooksInstrument.com is downloaded at the risk of the user.
We encourage users to provide feedback on this software before final release by sending an email via this link: Rob.Crane@BrooksInstrument.com
Documenation
Versions
Version
Description
Download
Version
Beta GP200 Embedded Gas Database V402
Description
Updates:
- Added LP Bin Table for 12 (HF)
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Version
Beta GP200 Embedded Gas Database #2628001
Description
Updates:
- Added CT Bin Gases: 566 (10% F2/He), 677 (20% F2/He), 963 (20% F2/N2), 980 (20% F2/Ar)
- Added LP Bin Gases: 418 (C5F12)
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Version
Beta Brooks Expert Support Tool (BEST) V5.13.9.16
Description
Download
Version
Beta FloCom Database db240125
Description
Updates:
- Added gas phosphorus pentafluoride, PF5, for GF1xxx MultiFlo
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Version
Beta FloCom Database db190220
Description
Featuring:
- The following gases/mixtures have been added to the database: SEMI Gas Code 1055
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Version
Beta FloCom Database db180712
Description
Featuring:
- The following gases/mixtures have been added to the database: SEMI Gas Code 1050
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Version
Beta MultiFlo Configurator V5.35.01
Description
Beta Version 5.35.01 includes these new features:
- GF100 Series High Flow MFCs can now be configured in SLPM
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